論文 1990
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Realization of Abrupt Interfaces in Si/Ge Superlattices by Suppressing
Ge Surface Segregation with Submonolayer of Sb
Ken Fujita, Susumu Fukatsu, Hiroyuki Yaguchi, Takayuki Igarashi, Yasuhiro Shiraki and Ryoichi Ito
Japanese Journal of Applied Physics Vol. 29, No. 11, pp. L1981-L1983 (1990).
DOI: 10.1143/JJAP.29.L1981
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Suppression of Interfacial Mixing in Si/Ge Superlattices by Sb Deposition
Ken Fujita, Susumu Fukatsu, Hiroyuki Yaguchi, Takayuki Igarashi, Yasuhiro Shiraki and Ryoichi Ito
Extended Abstracts of the 22nd Conference on Solid State Devices and Materials, pp. 1151-1152 (1990).
DOI: 10.7567/SSDM.1990.LN-D-1